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Monday, October 24, 2011

Zygo scores $9M tool optics deal

By Michelle Lang

Zygo Corp. has formed a contract deal with the University of Albany’s College of Nanoscale Science and Engineering and the chip-making association SEMATECH that will bring more than $9 million to the Middlefield, Conn., company.

Zygo supplies design and manufacturing services, optical metrology instruments and precision optics for the biomedical, scientific, semiconductor capital equipment and industrial markets.

The contract focuses on the development of extreme ultraviolet lithography optics for the fifth-generation micro-exposure tool (MET-5), which Zygo officials said in a press release would help bring semiconductor lithography resolution capability to under 16 nanometers. Currently the smallest scale in which semiconductors are made commercially is the 19nm flash memory made by a joint venture between Sandisk and Toshiba.

Zygo (Nasdaq: ZIGO) said in September that it had landed $6 million in metrology systems orders from two Chinese optical research and manufacturing organizations. 


 

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