Energetiq pulls in $5M in third funding round

By Efrain Viscarolasaga

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Woburn-based Energetiq Technology Inc., a maker of advanced light sources for nanoscale fabrication and analysis, has landed $3.8 million of a $5 million Series C round, according online reports.

Investors in the round include Shea Ventures of California, Intel Capital and Ushio Inc., a Japanese maker of light and laser equipment for a variety of applications, with its U.S. headquarters in California, reported website PE Hub, citing a federal regulatory filing.

Founded in 2004, Energetiq makes short wavelength light sources for a variety of applications, including semiconductor manufacturing, life sciences and research. The company’s semiconductor products, which are used in data storage and flat panel televisions, won an industry award from Semiconductor News magazine last summer.

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